Automatic Charge State Tuning of 300 mm FDSOI Quantum Dots Using Neural Network Segmentation of Charge Stability Diagram

Abstract

Tuning of gate-defined semiconductor quantum dots (QDs) is a major bottleneck for scaling spin qubit technologies. We present a deep learning (DL) driven, semantic-segmentation pipeline that performs charge auto-tuning by locating transition lines in full charge stability diagrams (CSDs) and returns gate voltage targets for the single charge regime. We assemble and manually annotate a large, heterogeneous dataset of 1015 experimental CSDs measured from silicon QD devices, spanning nine design geometries, multiple wafers, and fabrication runs. A U-Net style convolutional neural network (CNN) with a MobileNetV2 encoder is trained and validated through five-fold group cross validation. Our model achieves an overall offline tuning success of 80.0% in locating the single-charge regime, with peak performance exceeding 88% for some designs. We analyze dominant failure modes and propose targeted mitigations. Finally, wide-range diagram segmentation also naturally enables scalable physic-based feature extraction that can feed back to fabrication and design workflows and outline a roadmap for real-time integration in a cryogenic wafer prober. Overall, our results show that neural network (NN) based wide-diagram segmentation is a practical step toward automated, high-throughput charge tuning for silicon QD qubits.