LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing

Su Zheng, Haoyu Yang, Binwu Zhu, Bei Yu, Martin D. F. Wong
2/12/2026
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Cite this paper

@article{zheng2026lithobench,
  title  = {LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing},
  author = {Su Zheng and Haoyu Yang and Binwu Zhu and Bei Yu and Martin D. F. Wong},
  year   = {2026},
  doi    = {10.52202/075280-1315},
  url    = {https://doi.org/10.52202/075280-1315},
  journal = {NEURIPS 2023 2023}
}

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